CF Inline Color/Thickness/OD Measurement + Mura Inspection
Specification Table:
CF Inline Color/Thickness/OD Measurement System
Item Specifications
Glass size Up to 1950mm x 2250mm
Glass thickness 0.5mm~1.1mm
Optical Resolution 300~500 um
Target Defects CF Muras
Line Scan Output Defect Positions, efect Size, Defect Judgment
Color reproducibility x,y<= 0.001 Y<=0.1
OD reprodicibility OD<=0.05
Thickness reproducibility <5%
Thickness measurement range 1um~30um
Measured Objects CF R,G,B, BM, ITO, OC layers
Output Data Object film thickness value
Optional Functions SPC