Fine Resolution Array AOI (1um)
Specification Table:
Fine Resolution Array AOI
Item Specifications
Glass size Up to 1950mm x 2250mm
Glass thickness 0.4mm~1.1mm
Optical Resolution >1um
Target Defects Particles, line breakages, and other patterned defects
Line scan Output Defect positions, Defect sizes, Defect judgment
Optional Functions 1.SPC
2.Review System