Specification Table：

Fine Resolution Array AOI (1/2/3 um) Item Specifications Glass size Up to 1950mm x 2250mm Glass thickness 0.5mm~1.1mm Optical Resolution 1um/ 2um/ 3um Target Defects Particles, line breakages, and other patterned defects Line scan Output Defect positions, Defect sizes, Defect judgment Optional Functions 1.SPC 2.Review System